Low temperature MOCVD of Ta<sub>2</sub>O<sub>5</sub> dielectric thin films from Ta[NC(CH<sub>3</sub>)<sub>3</sub>][OC(CH<sub>3</sub>)<sub>3</sub>]<sub>3</sub> and O<sub>2</sub>
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چکیده
منابع مشابه
Low-temperature d.c. transport in anisotropic dirty thin dielectric films
A theory of low-temperature ohmic dc transport in dirty 2D quasi-one dimensional electronic crystals, such as charge-density wave (CDWs) thin films, is presented. At low temperatures we find that Efros-Shklovskii (ES) variable-range hopping (VRH) laws dominate the transport. At the lowest energies of the problem we find a usual impurity-independent linear Coulomb-gap (CG), g( ) ∝ , in the singl...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2016
ISSN: 1348-6535,1882-0743
DOI: 10.2109/jcersj2.15245